FS5001L series gas mass flow sensors are specially designed for the measurement and process control of various types of small flow gases. This series of sensors are all manufactured by the company's self-developed micro-electromechanical system (MEMS) flow sensor chip, which is suitable for all kinds of clean and dry gases. The sensor adopts the label installation, which makes the installation size more compact, and can easily realize the integration of multiple sensors in a small space.
Measuring range: 200SCCM, 500SCCM, 1000SCCM, 4000SCCM, 6000SCCM optional.